| Technical Parameter | |
| repeatability | ≤±2 μm |
| Minimum step | 0.1 μm |
| Wafer size | 2 inch |
| observation system | Dual camera real-time monitoring of sample stage |
| Heating and temperature measurement | Maximum heating of 400 degrees, temperature control accuracy：±0.5 ℃ |
| Equipment size | 2500*1400*2000 (mm) |
| Product Features |
| Independently controllable pure domestically produced core components |
| Domestic consumables with lower operating costs |
| Manual remote control can be achieved through the C-BOX controller |
| PC segment software can achieve automated operations |
| High throughput production |
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